Selectively arranged single-wire based nanosensor array systems for gas monitoring
Details
Type of access
Regular service
Research area
Devices
Topic
Sensors/transducers
Guarantor
Hubálek, Jaromír
Equipment
Magnetron sputtering system BESTEC
RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
Ion beam etching Scia Systems Coat 200
X-ray powder diffractometer Rigaku SmartLab 3kW
UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
Wire bonder TPT HB 16
Ion-Beam Sputter Deposition System BESTEC
RIE by F Chemistry and PECVD of hard C-based films Oxford Instruments Plasma Technology PlasmaPro 80
Ion beam etching Scia Systems Coat 200
X-ray powder diffractometer Rigaku SmartLab 3kW
UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
Wire bonder TPT HB 16
Ion-Beam Sputter Deposition System BESTEC