Ion-Beam Sputter Deposition System BESTEC
UHV sputter deposition system is equipped with two RFICP Kaufman ion-beam sources (KRI®) with 4 cm diameter grids (3-grid primary and 2-grid assisted/secondary) and charge neutralizer (LFN 2000 - KRI®). This setup is suitable for Ion-beam sputter deposition, Ion-beam assisted deposition, reactive sputter deposition with nitrogen and in-situ initial/continual substrate (pre-)cleaning. Etching (ion-milling) is not possible due to undesirable chamber and targets contamination.
Publications
Krčma, J., 2024: Controlled Excitation of Magnons through Optically Induced Mie Resonances in Periodic Dielectric Nanostructures. BACHELOR'S THESIS (EVAPORATOR, RAITH, RIE-FLUORINE, KAUFMAN, BRILLOUIN, VERIOS)
AIGNER, A.; LIGMAJER, F.; ROVENSKÁ, K.; HOLOBRÁDEK, J.; IDESOVÁ, B.; MAIER, S.; TITTL, A.; MENEZES, L., 2024: Engineering of Active and Passive Loss in High-Quality-Factor Vanadium Dioxide-Based BIC Metasurfaces. NANO LETTERS 24 (35), p. 10742 - 8, doi: 10.1021/acs.nanolett.4c01703 (KAUFMAN, ALD, EVAPORATOR)
GABLECH, I.; MIGLIACCIO, L.; BRODSKÝ, J.; HAVLÍČEK, M.; PODEŠVA, P.; HRDÝ, R.; EHLICH, J.; GRYSZEL, M.; GLOWACKI, E., 2023: High-Conductivity Stoichiometric Titanium Nitride for Bioelectronics. ADVANCED ELECTRONIC MATERIALS 9 (4), p. 1 - 11, doi: 10.1002/aelm.202200980 (KAUFMAN, ICON-SPM, PARYLENE-SCS, LYRA, KRATOS-XPS, RIGAKU3, KEITHLEY-4200)
EHLICH, J.; MIGLIACCIO, L.; SAHALIANOV, I.; NIKIĆ, M.; BRODSKÝ, J.; GABLECH, I.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2022: Direct measurement of oxygen reduction reactions at neurostimulation electrodes. JOURNAL OF NEURAL ENGINEERING 19 (3), p. 36045 - 15, doi: 10.1088/1741-2552/ac77c0 (KAUFMAN, MAGNETRON)
Holobrádek, J., 2022: Low damping magnonic (meta)materials with enhanced control over local magnetic properties. TREATISE TO STATE DOCTORAL EXAM, p. 1 - 26 (VERIOS, HELIOS, KERR-MICROSCOPE, MAGNETRON, KAUFMAN)
Jarušek, J., 2022: Sputtering of nitride layers using Kaufman ion-beam source for bioelectronics applications. BACHELOR'S THESIS, p. 1 - 75 (DEKTAK, KAUFMAN, RIE-CHLORINE, NANOCALC, RIGAKU9, KEITHLEY-4200)
Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS, p. 1 - 100 (KERR-MICROSCOPE, ICON-SPM, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD, WIRE-BONDER, SUSS-RCD8)
GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; HRABINA, J.; HOLÁ, M.; KUNZ, J.; BRODSKÝ, J.; NEUŽIL, P., 2020: Simple and efficient AlN-based piezoelectric energy harvesters. MICROMACHINES 11 (2), p. 1 - 10, doi: 10.3390/mi11020143 (DRIE, RIE-CHLORINE, WIRE-BONDER, KAUFMAN)
Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS, p. 1 - 199 (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
GABLECH, I.; SVATOŠ, V.; CAHA, O.; DUBROKA, A.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.; SCHNEIDER, M.; ŠIKOLA, T., 2019: Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup. THIN SOLID FILMS 670, p. 105 - 8, doi: 10.1016/j.tsf.2018.12.035 (KAUFMAN, ICON-SPM, RIGAKU9, WOOLLAM-VIS)
GABLECH, I.; KLEMPA, J.; PEKÁREK, J.; VYROUBAL, P.; KUNZ, J.; NEUŽIL, P., 2019: Aluminum nitride based piezoelectric harvesters. 2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS) (001), p. 1 - 4, doi: 10.1109/PowerMEMS49317.2019.82063211368 (DIENER, DRIE, DWL, KAUFMAN, RIE-CHLORINE, SUSS-MA8)
Bendova, M.; Kolar, J.; Marik, M.; Lednicky, T.; Mozalev, A., 2018: Influence of nitrogen species on the porous-alumina-assisted growth of TiO 2 nanocolumn arrays. ELECTROCHIMICA ACTA 281, p. 796 - 809, doi: 10.1016/j.electacta.2018.05.197 (KAUFMAN, HELIOS, TITAN, KRATOS-XPS, RIGAKU9)
CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10 (19), p. 9087 - 10, doi: 10.1039/c8nr01588k (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817 (MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)
GABLECH, I.; CAHA, O.; SVATOŠ, V.; PRÁŠEK, J.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T., 2018: Preparation of [001] Oriented Titanium Thin Film for MEMS Applications by Kaufman Ion-beam Source. 9TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2017), p. 117 - 6 (KAUFMAN, RIGAKU9)
GABLECH, I.; CAHA, O.; SVATOŠ, V.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T., 2017: Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source. THIN SOLID FILMS 638, p. 57 - 6, doi: 10.1016/j.tsf.2017.07.039 (ICON-SPM, KAUFMAN, RIGAKU9)
CHMELA, O.; SADÍLEK, J.; VALLEJOS VARGAS, S.; HUBÁLEK, J., 2017: Microelectrode array system as platforms for single nanowire based sensors. JOURNAL OF ELECTRICAL ENGINEERING 68 (2), p. 158 - 5, doi: 10.1515/jee-2017-0023 (DWL, KAUFMAN, MPS150, RIGAKU3)
Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2. NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000 (RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)
Gablech, I., 2016: CMOS compatible piezoelectric resonator with FET structure for graphene monolayer properties modulation. TREATISE TO STATE DOCTORAL EXAM, p. 1 - 31 (KAUFMAN, ICON-SPM, RIGAKU9)
GABLECH, I.; SVATOŠ, V.; CAHA, O.; HRABOVSKÝ, M.; PRÁŠEK, J.; HUBÁLEK, J.; ŠIKOLA, T., 2016: Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide. JOURNAL OF MATERIALS SCIENCE 51 (7), p. 3329 - 8, doi: 10.1007/s10853-015-9648-y (KAUFMAN, RIGAKU9, ICON-SPM)
Gallery
