Magnetron sputtering system BESTEC

The system consists of a sputter deposition chamber with 8 magnetrons in sputter up configuration. The lid flange of the sputtering chamber is sealed with double viton o- rings and differentially pumped. For the chamber we use turbomolecular pumps with scroll foreline pump. For good end pressure a Ti- sublimation pump is also included. With the pumping configuration it is possible to reach the base pressure of 3x 10-9 mbar with bake out of the clean chamber. The gas inlet in the process chambers is realized with mass flow controllers. For sputter gas Ar we use a 50sccm range device and for O2 and N2 a 10sccm device is used. Pressure regulation is done by up stream process using a three stage valve over the turbo pump. The substrates max. 4” in diameter or several smaller substráte pieces can be mounted on different sample holders from molybdenum (totally 2 in the scope of supply). There is a manually sample transfer foreseen into and out of the process chamber. In the process chamber the sample can be heated to 850°C with radiation heating. The sample stage is thermal shielded and water cooled to prevent from heating up. The substrate can rotate motorized with max. 30 rpm.

Publications

BENDOVÁ, M.; PRÁŠEK, J.; MOZALEV, A., 2024: XPS characterization of metal-oxide nanocolumn arrays via anodizing Al/Nb/Mo metal layers. NANOCON CONFERENCE PROCEEDINGS - INTERNATIONAL CONFERENCE ON NANOMATERIALS, p. 1 - 6, doi: 10.37904/nanocon.2023.4751 (MAGNETRON, KRATOS-XPS)

Castellano, A.; Alhada-Lahbabi, K.; Arregi, JA.; Uhlir, V.; Perrin, B.; Gourdon, C.; Fournier, D.; Verstraete, MJ.; Thevenard, L., 2024: Magnetic phase dependency of the thermal conductivity of FeRh from thermoreflectance experiments and numerical simulations. PHYSICAL REVIEW MATERIALS 8 (8), doi: 10.1103/PhysRevMaterials.8.084411 (MAGNETRON, VERSALAB, RIGAKU9, WOOLLAM-VIS)

OURDANI, D.; CASTELLANO, A.; VYTHELINGUM, A.; ARREGI URIBEETXEBARRIA, J.; UHLÍŘ, V.; PERRIN, B.; BELMEGUENAI, M.; ROUSSIGNÉ, Y.; GOURDON, C.; VERSTRAETE, M.; THEVENARD, L., 2024: Experimental determination of the temperature- and phase-dependent elastic constants of FeRh. PHYSICAL REVIEW B 110 (1), doi: 10.1103/PhysRevB.110.014427 (MAGNETRON, VERSALAB)

MATTERN, M.; PUDELL, J.; ARREGI URIBEETXEBARRIA, J.; ZLÁMAL, J.; KALOUSEK, R.; UHLÍŘ, V.; RÖSSLE, M.; BARGHEER, M., 2024: Accelerating the Laser-Induced Phase Transition in Nanostructured FeRh via Plasmonic Absorption. ADVANCED FUNCTIONAL MATERIALS 34 (32), doi: 10.1002/adfm.202313014 (MAGNETRON, VERSALAB, RIGAKU9, ICON-SPM, WOOLLAM-VIS)

Opršal, J., 2024: Fabrication and study of epitaxial NiO thin films and their antiferromagnetic domain structure. MASTER'S THESIS, p. 1 - 48 (MAGNETRON, RIGAKU9, KERR-MICROSCOPE)

Hrdinová, S., 2024: Influence of the epitaxial strain at the lateral thin film-stripe interface on the Ferromagnetic-Antiferromagnetic phase coexistence in FeRh. BACHELOR'S THESIS, p. 1 - 49 (MAGNETRON, VERSALAB, ICON-SPM)

Otýpka, M., 2024: Electric-current Control of Magnetic Textures in Synthetic Antiferromagnets. BACHELOR'S THESIS, p. 1 - 56 (MAGNETRON, VERSALAB, DWL, WIRE-BONDER, KERR-MICROSCOPE)

JAKEŠOVÁ, M.; KUNOVSKÝ, O.; GABLECH, I.; KHODAGHOLY, D.; GELINAS, J.; GLOWACKI, E., 2024: Coupling of photovoltaics with neurostimulation electrodes-optical to electrolytic transduction. JOURNAL OF NEURAL ENGINEERING 21 (4), doi: 10.1088/1741-2552/ad593d (PARYLENE-SCS, MAGNETRON, SUSS-MA8, EVAPORATOR, RIE-FLUORINE, DIENER, WIRE-BONDER)

Foltýn, M., 2024: Plasmonics of non-noble metals. MASTER'S THESIS, p. 1 - 83 (HELIOS, MAGNETRON, TITAN, RIGAKU3)

WOJEWODA, O.; HOLOBRÁDEK, J.; PAVELKA, D.; PRIBYTOVA, E.; KRČMA, J.; KLÍMA, J.; PANDA, J.; MICHALIČKA, J.; LEDNICKÝ, T.; CHUMAK, A.; URBÁNEK, M., 2024: Unidirectional propagation of zero-momentum magnons. APPLIED PHYSICS LETTERS 125 (13), p. 1 - 6, doi: 10.1063/5.0218478 (TITAN, BRILLOUIN, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, RAITH, VERSALAB)

MOTYČKOVÁ, L.; ARREGI URIBEETXEBARRIA, J.; STAŇO, M.; PRŮŠA, S.; ČÁSTKOVÁ, K.; UHLÍŘ, V., 2023: Preserving Metamagnetism in Self-Assembled FeRh Nanomagnets. ACS APPLIED MATERIALS & INTERFACES 15 (6), p. 8653 - 13, doi: 10.1021/acsami.2c20107 (MAGNETRON, VERSALAB, RIGAKU9, ICON-SPM, VERIOS)

KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24 (1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324 (MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, KRATOS-XPS, MPS150)

ARREGI URIBEETXEBARRIA, J.; RINGE, F.; HAJDUČEK, J.; GOMONAY, O.; MOLNÁR, T.; JASKOWIEC, J.; UHLÍŘ, V., 2023: Magnetic-field-controlled growth of magnetoelastic phase domains in FeRh. JOURNAL OF PHYSICS: MATERIALS 6 (3), p. 1 - 15, doi: 10.1088/2515-7639/acce6f (MAGNETRON, KERR-MICROSCOPE, VERSALAB, RIGAKU9, ICON-SPM, HELIOS, TITAN)

MISIUREV, D.; KASPAR, P.; SOBOLA, D.; PAPEZ, N.; FAWAEER, S.H.; HOLCMAN, V., 2023: Exploring the Piezoelectric Properties of Bismuth Ferrite Thin Films Using Piezoelectric Force Microscopy: A Case Study. MATERIALS 16 (8), p. 1 - 18, doi: 10.3390/ma16083203 (MAGNETRON, KRATOS-XPS)

WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6 (1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD, LYRA, ICON-SPM, BRILLOUIN)

HORÁK, M.; KONEČNÁ, A.; ŠIKOLA, T.; KŘÁPEK, V., 2023: Spatio-spectral metrics in electron energy loss spectroscopy as a tool to resolve nearly degenerate plasmon modes in dimer plasmonic antennas. NANOPHOTONICS 12 (15), p. 3089 - 10, doi: 10.1515/nanoph-2023-0153 (MAGNETRON, HELIOS, TITAN)

WOJEWODA, O.; HRTOŇ, M.; DHANKHAR, M.; KRČMA, J.; DAVÍDKOVÁ, K.; KLÍMA, J.; HOLOBRÁDEK, J.; LIGMAJER, F.; ŠIKOLA, T.; URBÁNEK, M., 2023: Phase-resolved optical characterization of nanoscale spin waves. APPLIED PHYSICS LETTERS 122 (20), p. 1 - 6, doi: 10.1063/5.0151338 (RAITH, BRILLOUIN, LYRA, MAGNETRON, EVAPORATOR)

Hnilica, J., 2023: Current-induced domain wall propagation in ferrimagnetic wires. MASTER'S THESIS (MAGNETRON, VERSALAB, RIGAKU9, SUSS-RCD8, DWL, WIRE-BONDER, KERR-MICROSCOPE)

Molnár, T., 2023: Magneto-optical gradient effect imaging of magnetic textures. MASTER'S THESIS, p. 1 - 73 (MAGNETRON, RIGAKU9, KERR-MICROSCOPE, TITAN)

POLAT, Ö.; HORÁK, M.; ARREGI URIBEETXEBARRIA, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Synthesis and characterization of half-Heusler ScPtBi films via three-source magnetron co-sputtering on Nb superconductor buffer layer. SURFACES AND INTERFACES 40, doi: 10.1016/j.surfin.2023.103118 (MAGNETRON, RIGAKU9, TITAN, HELIOS, KRATOS-XPS, LYRA)

KAMNEV, K.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KEJÍK, L.; GUELL, F.; LLOBET, E.; MOZALEV, A., 2023: Se-doped Nb2O5-Al2O3 composite-ceramic nanoarrays via the anodizing of Al/Nb bilayer in selenic acid. CERAMICS INTERNATIONAL 49 (22), p. 34712 - 14, doi: 10.1016/j.ceramint.2023.08.134 (MAGNETRON, VERIOS, KRATOS-XPS, MPS150, KEITHLEY-4200)

POLAT, Ö.; ARREGI URIBEETXEBARRIA, J.; HORÁK, M.; POLČÁK, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2022: The fabrication and characterization of half-Heusler YPdBi thin films. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS 161, p. 1 - 6, doi: 10.1016/j.jpcs.2021.110447 (MAGNETRON, RIGAKU9, LYRA, TITAN, HELIOS, KRATOS-XPS)

MENDOSA-SANDOVAL, E.; RODRIGUEZ-LOPEZ, G.; ORDONEZ-ROMERO, C.; LAY, D.; QURESHI, N.; URBÁNEK, M.; SOLIS-IBARRA, D.; NOGUEZ, C.; LARA-GARCIA, H.; PIRRUCCIO, G., 2022: Shaping and enhancing the photoluminescence of halide perovskite quantum dots with plasmonic lattices. JOURNAL OF MATERIALS CHEMISTRY C, p. 3704 - 9, doi: 10.1039/d1tc05331k (RAITH, MAGNETRON, RIE-CHLORINE, LYRA)

MANAKHOV, A.; PERMYAKOVA, E.; SITNIKOVA, N.; TSYGANKOVA, A.; ALEKSEEV, A.; SOLOMATINA, M.; BAIDYSHEV, V.; POPOV, Z.; JANŮ, L.; ELIÁŠ, M.; ZAJÍČKOVÁ, L.; KOVALSKII, A.; SHEVEYKO, A.; KIRYUKHANTSEV-KORNEEV, P.; SHTANSKY, D.; NEČAS, D.; SOLOVIEVA, A., 2022: Biodegradable Nanohybrid Materials as Candidates for Self-Sanitizing Filters Aimed at Protection from SARS-CoV-2 in Public Areas. MOLECULES 27 (4), doi: 10.3390/molecules27041333 (MAGNETRON, KRATOS-XPS)

POLAT, Ö.; MOHELSKÝ, I.; ARREGI URIBEETXEBARRIA, J.; HORÁK, M.; POLČÁK, J.; BUKVIŠOVÁ, K.; ZLÁMAL, J.; ŠIKOLA, T., 2022: An investigation of structural and magnetotransport features of half-Heusler ScPtBi thin films. MATERIALS RESEARCH BULLETIN 149, p. 111696-1 - 7, doi: 10.1016/j.materresbull.2021.111696 (MAGNETRON, RIGAKU9, LYRA, TITAN, HELIOS, KRATOS-XPS)

Velič, A., 2022: Optical study of laser-induced magnetic phase transitions. BACHELOR'S THESIS, p. 1 - 42 (MAGNETRON, VERSALAB, KERR-MICROSCOPE)

EHLICH, J.; MIGLIACCIO, L.; SAHALIANOV, I.; NIKIĆ, M.; BRODSKÝ, J.; GABLECH, I.; VU, X.; INGEBRANDT, S.; GLOWACKI, E., 2022: Direct measurement of oxygen reduction reactions at neurostimulation electrodes. JOURNAL OF NEURAL ENGINEERING 19 (3), p. 36045 - 15, doi: 10.1088/1741-2552/ac77c0 (KAUFMAN, MAGNETRON)

KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: Comparison of on-chip MIS capacitors based on stacked HfO2/Al2O3 nanolaminates. MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664 (ALD, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS)

Holobrádek, J., 2022: Low damping magnonic (meta)materials with enhanced control over local magnetic properties. TREATISE TO STATE DOCTORAL EXAM, p. 1 - 26 (VERIOS, HELIOS, KERR-MICROSCOPE, MAGNETRON, KAUFMAN)

Kamnev, K., 2022: Porous-alumina-assisted formation of metal and metal-oxide nanostructures for use in advanced micro-devices. PH.D. THESIS, p. 1 - 145 (VERIOS, HELIOS, TITAN, MAGNETRON, MPS150, KEITHLEY-4200)

Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS, p. 1 - 113 (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)

SEPÚLVEDA SEPÚLVEDA, L.; KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Superhydrophobic-Oleophobic Visible-Transparent Antireflective Nanostructured Anodic HfO2 Multifunctional Coatings for Potential Solar Panel Applications. ACS APPLIED NANO MATERIALS 4 (2), p. 1754 - 12, doi: 10.1021/acsanm.0c03202 (MAGNETRON, RIE-FLUORINE, VERIOS, JAZ3-CHANNEL)

Hajduček, J., 2021: Imaging of metamagnetic thin films using TEM. MASTER'S THESIS, p. 1 - 78 (MAGNETRON, VERSALAB, MIRA-EBL, HELIOS, TITAN)

Zadorozhnii, O., 2021: Exchange bias in metamagnetic heterostructures. MASTER'S THESIS, p. 1 - 81 (MAGNETRON, VERSALAB, KERR-MICROSCOPE, RAITH, RIE-FLUORINE, LYRA)

Hnilica, J., 2021: Deposition of low-damping metamagnetic thin films. BACHELOR'S THESIS, p. 1 - 57 (MAGNETRON, VERSALAB, VNA-MPI)

Molnár, T., 2021: Magneto-optical imaging and analysis of magnetic domain microstructures. BACHELOR'S THESIS, p. 1 - 52 (MAGNETRON, KERR-MICROSCOPE)

FOHLEROVÁ, Z.; KAMNEV, K.; SEPÚLVEDA SEPÚLVEDA, L.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Nanostructured Zirconium-Oxide Bioceramic Coatings Derived from the Anodized Al/Zr Metal Layers. ADVANCED MATERIALS INTERFACES 14 (8), p. 1 - 14, doi: 10.1002/admi.202100256 (MAGNETRON, VERIOS)

SEPÚLVEDA SEPÚLVEDA, L.; KAMNEV, K.; MOZALEV, A., 2021: Dielectric properties of nanostructured mixed-oxide films formed by anodizing Al/Zr bilayers. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON), p. 44 - 6, doi: 10.37904/nanocon.2020.3693 (MAGNETRON, VERIOS)

KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Anodic formation of HfO2 nanostructure arrays for resistive switching application. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON), p. 122 - 5, doi: 10.37904/nanocon.2020.3692 (MAGNETRON, VERIOS, MPS150)

PRESSACCO, F.; SANGALLI, D.; UHLÍŘ, V.; KUTNYAKHOV, D.; ARREGI URIBEETXEBARRIA, J.; AGUSTSSON, S.; BRENNER, G.; REDLIN, H.; HEBER, M.; VASILYEV, D.; DEMSAR, J.; SCHÖNHENSE, G.; GATTI, M.; MARINI, A.; WURTH, W.; SIROTTI, F., 2021: Subpicosecond metamagnetic phase transition in FeRh driven by non-equilibrium electron dynamics. NATURE COMMUNICATIONS 12 (1), p. 5088-1 - 8, doi: 10.1038/s41467-021-25347-3 (MAGNETRON, RIGAKU9, VERSALAB)

Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS, p. 1 - 100 (KERR-MICROSCOPE, ICON-SPM, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD, WIRE-BONDER, SUSS-RCD8)

KAMNEV, K.; SEPÚLVEDA SEPÚLVEDA, L.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KOLÍBALOVÁ, E.; MICHALIČKA, J.; MOZALEV, A., 2021: The Growth, Composition, and Functional Properties of Self-Organized Nanostructured ZrO2-Al2O3 Anodic Films for Advanced Dielectric Applications. MATERIALS CHEMISTRY FRONTIERS 7 (10), p. 1 - 13, doi: 10.1002/aelm.202100505 (TITAN, MAGNETRON, HELIOS, VERIOS)

VAŇATKA, M.; SZULC, K.; WOJEWODA, O.; DUBS, C.; CHUMAK, A.; KRAWCZYK, M.; DOBROVOLSKIY, O.; KLOS, J.; URBÁNEK, M., 2021: Spin-Wave Dispersion Measurement by Variable-Gap Propagating Spin-Wave Spectroscopy. PHYSICAL REVIEW APPLIED 16 (5), p. 054033-1 - 10, doi: 10.1103/PhysRevApplied.16.054033 (VNA-MPI, BRILLOUIN, RAITH, EVAPORATOR, MAGNETRON, DIENER, VERIOS, RIE-FLUORINE)

Slavík, J., 2021: Patterning of excitable cells on multi-electrode arrays. PH.D. THESIS, p. 1 - 102 (DWL, EVAPORATOR, PARYLENE-SCS, RIE-FLUORINE, LYRA, MAGNETRON, ICON-SPM, LEICACOAT-NANO)

MOZALEV, A.; PYTLÍČEK, Z.; KAMNEV, K.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E., 2021: Zirconium oxide nanoarrays via the self-organized anodizing of Al/Zr bilayers on substrates. MATERIALS CHEMISTRY FRONTIERS, p. 1917 - 15, doi: 10.1039/d0qm00862a (MAGNETRON, KRATOS-XPS)

MANAKHOV, A.; SITNIKOVA, N.; TSYGANKOVA, A.; ALEKSEEV, A.; ADAMENKO, L.; PERMYAKOVA, E.; BAIDYSHEV, V.; POPOV, Z.; BLAHOVÁ, L.; ELIÁŠ, M.; ZAJÍČKOVÁ, L.; SOLOVIEVA, A., 2021: Electrospun Biodegradable Nanofibers Coated Homogenously by Cu Magnetron Sputtering Exhibit Fast Ion Release. Computational and Experimental Study. MEMBRANES 11 (12), p. 1 - 19, doi: 10.3390/membranes11120965 (MAGNETRON, KRATOS-XPS, MIRA-STAN)

LEDNICKÝ, T.; BONYÁR, A., 2020: Large Scale Fabrication of Ordered Gold Nanoparticle-Epoxy Surface Nanocomposites and Their Application as Label-Free Plasmonic DNA Biosensors. ACS APPL MATER INTER 12 (4), p. 4804 - 11, doi: 10.1021/acsami.9b20907 (MAGNETRON, RIE-FLUORINE, VERIOS, LYRA, HELIOS, KRATOS-XPS)

Horák, M., 2020: Electron microscopy and spectroscopy in plasmonics. PH.D. THESIS, p. 1 - 129 (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)

UHLÍŘ, V.; PRESSACCO, F.; ARREGI URIBEETXEBARRIA, J.; PROCHÁZKA, P.; PRŮŠA, S.; POTOČEK, M.; ŠIKOLA, T.; ČECHAL, J.; BENDOUNAN, A.; SIROTTI, F., 2020: Single-layer graphene on epitaxial FeRh thin films. APPLIED SURFACE SCIENCE 514, p. 145923-1 - 7, doi: 10.1016/j.apsusc.2020.145923 (MAGNETRON, VERSALAB, RIGAKU9, SIMS)

ARREGI URIBEETXEBARRIA, J.; CAHA, O.; UHLÍŘ, V., 2020: Evolution of strain across the magnetostructural phase transition in epitaxial FeRh films on different substrates. PHYSICAL REVIEW B 101 (17), p. 174413-1 - 14, doi: 10.1103/PhysRevB.101.174413 (MAGNETRON, VERSALAB, RIGAKU9)

Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS, p. 1 - 199 (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)

Mohelský, I., 2020: Infrared magneto–spectroscopy of Bi2Te3 topological insulator. MASTER'S THESIS, p. 1 - 49 (FTIR, WOOLLAM-MIR, MAGNETRON, KRATOS-XPS)

Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER'S THESIS, p. 1 - 57 (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)

KAMNEV, K.; PRÁŠEK, J.; MOZALEV, A., 2020: Anodic formation and SEM characterization of zirconium oxide nanostructured films. NANOCON CONFERENCE PROCEEDINGS - INTERNATIONAL CONFERENCE ON NANOMATERIALS, p. 631 - 636, doi: 10.37904/nanocon.2019.8711 (MAGNETRON)

Motyčková, L., 2020: Magnetic properties of self-assembled FeRh nanomagnets. MASTER'S THESIS, p. 1 - 90 (MAGNETRON, VERSALAB, ICON-SPM, RIGAKU9, VERIOS, KERR-MICROSCOPE)

Michlíček, M.; Manakhov, A.; Dvořáková, E.; Zajíčková, L., 2019: Homogeneity and penetration depth of atmospheric pressure plasma polymerization onto electrospun nanofibrous mats. APPLIED SURFACE SCIENCE 471, p. 835 - 841, doi: 10.1016/j.apsusc.2018.11.148 (LYRA, MAGNETRON, FTIR, KRATOS-XPS)

HORÁK, M.; KŘÁPEK, V.; HRTOŇ, M.; KONEČNÁ, A.; LIGMAJER, F.; STÖGER-POLLACH, M.; ŠAMOŘIL, T.; PATÁK, A.; ÉDES, Z.; METELKA, O.; BABOCKÝ, J.; ŠIKOLA, T., 2019: Limits of Babinet’s principle for solid and hollow plasmonic antennas. SCIENTIFIC REPORTS 9, p. 1 - 11, doi: 10.1038/s41598-019-40500-1 (FTIR, HELIOS, LYRA, MAGNETRON, TITAN)

Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR'S THESIS, p. 1 - 46 (MAGNETRON, ICON-SPM, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB)

Vojáček, L., 2019: Magneto-optical investigation of spintronic materials. BACHELOR'S THESIS, p. 1 - 51 (MAGNETRON, VERSALAB)

Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER'S THESIS, p. 1 - 55 (MAGNETRON, MIRA-EBL, RAITH, ICON-SPM, VERSALAB)

Konečný, A., 2019: Evaluation of Different Dielectrics For Mid-Infrared Waveguides. BACHELOR'S THESIS, p. 1 - 32 (MAGNETRON, PECVD, ALD, WOOLLAM-MIR)

CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10 (19), p. 9087 - 10, doi: 10.1039/c8nr01588k (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)

NEUGEBAUER, P.; BLOOS, D.; MARX, R.; LUTZ, P.; KERN, M.; AGUILA, D.; VAVERKA, J.; LAGUTA, O.; DIETRICH, C.; CLÉRAC, R.; VAN SLAGEREN, J., 2018: Ultra-broadband EPR spectroscopy in field and frequency domains. PHYSICAL CHEMISTRY CHEMICAL PHYSICS 20 (22), p. 15528 - 7, doi: 10.1039/c7cp07443c (MAGNETRON)

BENDOVÁ, M.; KOLÁŘ, J.; GISPERT-GUIRADO, F.; MOZALEV, A., 2018: Porous-Alumina-Assisted Growth of Nanostructured Anodic Films on Ti-Nb Alloys. CHEMELECTROCHEM 5 (19), p. 2825 - 11, doi: 10.1002/celc.201800785 (MAGNETRON, RIGAKU9, KRATOS-XPS, TITAN)

Motyčková, L., 2018: Epitaxial growth and characterization of metamagnetic nanoparticles for biomedical applications. BACHELOR'S THESIS, p. 1 - 55 (MAGNETRON, ICON-SPM, LYRA)

Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER'S THESIS, p. 1 - 68 (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, RIE-CHLORINE, SUSS-MA8, DEKTAK, MPS150)

ARREGI URIBEETXEBARRIA, J.; HORKÝ, M.; FABIANOVÁ, K.; TOLLEY, R.; FULLERTON, E.; UHLÍŘ, V., 2018: Magnetization reversal and confinement effects across the metamagnetic phase transition in mesoscale FeRh structures. JOURNAL OF PHYSICS D - APPLIED PHYSICS 51 (10), p. 1 - 12, doi: 10.1088/1361-6463/aaaa5a (MIRA-EBL, LYRA, MAGNETRON)

PRESSACCO, F.; UHLÍŘ, V.; GATTI, M.; NICOLAOU, A.; BENDOUNAN, A.; ARREGI URIBEETXEBARRIA, J.; PATEL, S.; FULLERTON, E.; KRIZMANCIC, D.; SIROTTI, F., 2018: Laser induced phase transition in epitaxial FeRh layers studied by pump-probe valence band photoemission. STRUCTURAL DYNAMICS 5 (3), p. 034501-1 - 11, doi: 10.1063/1.5027809 (MAGNETRON, RIGAKU9)

Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER'S THESIS, p. 1 - 55 (MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER)

Jaskowiec, J., 2017: Magnetic Force Microscopy and Transport Properties of Metamagnetic Nanostructures. BACHELOR'S THESIS, p. 1 - 47 (MAGNETRON, MIRA-EBL, RAITH, ICON-SPM, LYRA)

Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2. NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000 (RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)

Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM, p. 1 - 31 (TITAN, MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)

Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS, p. 1 - 54 (PECVD, MIRA-EBL, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)

MANAKHOV, A.; MICHLÍČEK, M.; NEČAS, D.; POLČÁK, J.; MAKHNEVA, E.; ELIÁŠ, M.; ZAJÍČKOVÁ, L., 2016: Carboxyl-rich coatings deposited by atmospheric plasma co-polymerization of maleic anhydride and acetylene. SURFACE AND COATINGS TECHNOLOGY 295, p. 37 - 9, doi: 10.1016/j.surfcoat.2015.11.039 (FTIR, ICON-SPM, LYRA, MAGNETRON)

Gallery

Specification

Methods

Deposition of Ag, Al, Au, Bi, C, Co, Cr, Cu, Gd, Fe, Hf, Mo, Mn, Nb, Ni, Pt, Ru, Si, Sb, Sc, Ta, Ti, W, Zr, TiN, TiO2, AlCuSi, NiCr, Ni80Fe20, Ir20Mn80, Fe75Co25, Fe50Rh50, Al2O3, SiO2, Co20Fe60B20

Details

Type of access
Full-service (paid), Self-service
Research area
Devices, Synthesis
Category
PVD
Subcategory
Sputtering
Guarantor
Prášek, Jan
Site
CEITECNANO
Location
CEITEC Nano - C1.36

Documents

List of Experienced Users in Thin Film Deposition Lab C1.36
External Manuals & Docs
MAGNETRON Guide