4-probe station Cascade Microtech MPS 150

Probe station CASCADE MPS 150 is a modular probe station system which allows various configurations. System is designed for four-point electrical measurement in temperatures up to 300°C in combination with source measurement units. Machine allows wafer level device characterization I-V/C-V, RF, and another electrical testing.

Publications

GHOSH, K.; NG, S.; LAZAR, P.; KANDAMBATH PADINJAREVEETIL, A.; MICHALIČKA, J.; PUMERA, M., 2024: 2D Germanane-MXene Heterostructures for Cations Intercalation in Energy Storage Applications. ADVANCED FUNCTIONAL MATERIALS, doi: 10.1002/adfm.202308793 (RIGAKU3, KRATOS-XPS, TITAN, VERIOS, KEITHLEY-4200, MPS150, BET-ANAMET)

KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines. ACS APPLIED ELECTRONIC MATERIALS 6 (12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450 (ALD, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, WIRE-BONDER)

KAMNEV, K.; PYTLÍČEK, Z.; BENDOVÁ, M.; PRÁŠEK, J.; GISPERT-GUIRADO, F.; LLOBET, E.; MOZALEV, A., 2023: The planar anodic Al2O3-ZrO2 nanocomposite capacitor dielectrics for advanced passive device integration. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 24 (1), p. 1 - 17, doi: 10.1080/14686996.2022.2162324 (MAGNETRON, SUSS-MA8, SUSS-RCD8, VERIOS, KRATOS-XPS, MPS150)

GHOSH, K.; IFFELSBERGER, C.; KONEČNÝ, M.; VYSKOČIL, J.; MICHALIČKA, J.; PUMERA, M., 2023: Nanoarchitectonics of Triboelectric Nanogenerator for Conversion of Abundant Mechanical Energy to Green Hydrogen. ADVANCED ENERGY MATERIALS 13 (11), doi: 10.1002/aenm.202203476 (VERIOS, MIRA-STAN, TITAN, RIGAKU3, ICON-SPM, MPS150, KEITHLEY-4200)

KAMNEV, K.; BENDOVÁ, M.; PYTLÍČEK, Z.; PRÁŠEK, J.; KEJÍK, L.; GUELL, F.; LLOBET, E.; MOZALEV, A., 2023: Se-doped Nb2O5-Al2O3 composite-ceramic nanoarrays via the anodizing of Al/Nb bilayer in selenic acid. CERAMICS INTERNATIONAL 49 (22), p. 34712 - 14, doi: 10.1016/j.ceramint.2023.08.134 (MAGNETRON, VERIOS, KRATOS-XPS, MPS150, KEITHLEY-4200)

GABLECH, I.; BRODSKÝ, J.; VYROUBAL, P.; PIASTEK, J.; BARTOŠÍK, M.; PEKÁREK, J., 2022: Mechanical strain and electric-field modulation of graphene transistors integrated on MEMS cantilevers. JOURNAL OF MATERIALS SCIENCE 57 (3), p. 1923 - 13, doi: 10.1007/s10853-021-06846-6 (RIE-FLUORINE, DRIE, EVAPORATOR, WIRE-BONDER, MPS150, KEITHLEY-4200, SUSS-MA8, DWL)

NG, S.; GHOSH, K.; VYSKOČIL, J.; PUMERA, M., 2022: Two-dimensional vanadium sulfide flexible graphite/polymer films for near-infrared photoelectrocatalysis and electrochemical energy storage. CHEMICAL ENGINEERING JOURNAL 435 (P3), p. 135131-1 - 14, doi: 10.1016/j.cej.2022.135131 (MPS150, KEITHLEY-4200, VERIOS, KRATOS-XPS, RIGAKU3)

GHOSH, K.; NG, S.; IFFELSBERGER, C.; PUMERA, M., 2022: 2D MoS2/carbon/polylactic acid filament for 3D printing: Photo and electrochemical energy conversion and storage. APPLIED MATERIALS TODAY 26, p. 101301-1 - 10, doi: 10.1016/j.apmt.2021.101301 (VERIOS, KRATOS-XPS, RIGAKU3, MPS150, KEITHLEY-4200)

Sreedhara, MB.; Bukvisova, K.; Khadiev, A.; Citterberg, D.; Cohen, H.; Balema, V.; Pathak, AK.; Novikov, D.; Leitus, G.; Kaplan-Ashiri, I.; Kolibal, M.; Enyashin, AN.; Houben, L.; Tenne, R., 2022: Nanotubes from the Misfit Layered Compound (SmS)(1.)19TaS2: Atomic Structure, Charge Transfer, and Electrical Properties. CHEMISTRY OF MATERIALS 34 (4), p. 1838 - 16, doi: 10.1021/acs.chemmater.1c04106 (TITAN, HELIOS, RAITH, EVAPORATOR, MPS150, KEITHLEY-4200, ALD)

KARTCI, A.; VANČÍK, S.; PRÁŠEK, J.; HRDÝ, R.; SCHNEIDER, M.; SCHMID, U.; HUBÁLEK, J., 2022: Comparison of on-chip MIS capacitors based on stacked HfO2/Al2O3 nanolaminates. MATERIALS TODAY COMMUNICATIONS 33, p. 1 - 8, doi: 10.1016/j.mtcomm.2022.104664 (ALD, EVAPORATOR, SUSS-MA8, SUSS-RCD8, MAGNETRON, TITAN, MPS150, KEITHLEY-4200, SUMMIT, KRATOS-XPS)

Vodička, M., 2022: Fabrication and characterisation of plasmonic antennas on selected thin film with aim to get enhanced absorption due to presence of strong coupling. BACHELOR'S THESIS, p. 1 - 60 (MIRA-EBL, FTIR, EVAPORATOR, MPS150)

Děcký, M., 2022: Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas. BACHELOR'S THESIS, p. 1 - 44 (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)

Kamnev, K., 2022: Porous-alumina-assisted formation of metal and metal-oxide nanostructures for use in advanced micro-devices. PH.D. THESIS, p. 1 - 145 (VERIOS, HELIOS, TITAN, MAGNETRON, MPS150, KEITHLEY-4200)

Brodský J., 2021: Gas sensors based on 1D and 2D materials. MASTER'S THESIS, p. 1 - 84 (DWL, DIENER, SUSS-RCD8, SUSS-MA8, EVAPORATOR, MPS150, ICON-SPM, RIE-FLUORINE, DRIE, LYRA)

KAMNEV, K.; PYTLÍČEK, Z.; PRÁŠEK, J.; MOZALEV, A., 2021: Anodic formation of HfO2 nanostructure arrays for resistive switching application. 12TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH AND APPLICATION (NANOCON), p. 122 - 5, doi: 10.37904/nanocon.2020.3692 (MAGNETRON, VERIOS, MPS150)

Pejchal, T., 2021: Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis. PH.D. THESIS (NANOSAM, VERIOS, KRATOS-XPS, HELIOS, TITAN, ALD, EVAPORATOR, MIRA-EBL, MPS150)

Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS, p. 1 - 199 (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)

Tesař, J., 2020: Fabrication and characterization of atomically thin layers. MASTER'S THESIS, p. 1 - 67 (MPS150, EVAPORATOR, RAITH, ICON-SPM, WIRE-BONDER)

Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR'S THESIS, p. 1 - 50 (MPS150, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)

Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER'S THESIS, p. 1 - 50 (MIRA-EBL, EVAPORATOR, WIRE-BONDER, TITAN, MPS150)

Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER'S THESIS, p. 1 - 68 (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, RIE-CHLORINE, SUSS-MA8, DEKTAK, MPS150)

HRDÝ, R.; KYNCLOVÁ, H.; KLEPÁČOVÁ, I.; BARTOŠÍK, M.; NEUŽIL, P., 2017: Portable Lock-in Amplifier-Based Electrochemical Method to Measure an Array of 64 Sensors for Point-of-Care Applications. ANALYTICAL CHEMISTRY 89 (17), p. 8731 - 7, doi: 10.1021/acs.analchem.7b00776 (MPS150, WIRE-BONDER)

CHMELA, O.; SADÍLEK, J.; VALLEJOS VARGAS, S.; HUBÁLEK, J., 2017: Microelectrode array system as platforms for single nanowire based sensors. JOURNAL OF ELECTRICAL ENGINEERING 68 (2), p. 158 - 5, doi: 10.1515/jee-2017-0023 (DWL, KAUFMAN, MPS150, RIGAKU3)

Gallery

Details

Type of access
Full-service (paid), Self-service
Research area
Devices
Category
Testing
Guarantor
Hrdý, Radim
Site
CEITECNANO
Location
CEITEC Nano - C1.57

Documents

External Manuals & Docs