E-beam writer RAITH150 Two

Raith 150 Two is high resolution low voltage electron beam lithography (EBL) and metrology system. It is suitable for research and development of MEMS, micro and nanoelectronic, plasmonic, photonic systems and integrated optical devices. It comes with sample holders capable of mounting up to 6" substrate. The fabrication of 20 nm structures is guaranteed, while it is possible to write structures down to 10 nm in size. The system also contains FBMS (fixed beam moving stage) module for writing of long continuous patterns without stitching errors, and proximity effect correction SW package is available for optimized writing of near objects. Raith 150 Two is equipped with ultra high resolution Carl-Zeiss Gemini electron optics system. SEM image is recorded with help of InLens and SE detectors with resolution of 1 – 2 nm at most acceleration voltages. The range of voltages is 0,3 – 30 kV and the user can select the apertures to control the beam current. High precision writing is possible due to laser interferometric stage with the lateral movement resolution of 2 nm and large scale Z travel. This EBL system is suitable for long, time demanding exposures also thanks to its split room setup, which ensures environmental isolation together with temperature stabilization. Sample requirements ================= Composition: no material limitation, sample must be solid, very flat, thin, and of orthogonal or rounded shape best Sample size: minimum size is not limited, universal sample holder mounts up to 4" substrates, other holders are available for 6" substrates, 5" and 7" masks

Publications

ROY, R.; HOLEC, D.; MICHAL, L.; HEMZAL, D.; SARKAR, S.; KUMAR, G.; NEČAS, D.; DHANKHAR, M.; KAUSHIK, P.; GOMEZ PEREZ, I.; ZAJÍČKOVÁ, L., 2024: Possible charge ordering and anomalous transport in graphene/graphene quantum dot heterostructure. JOURNAL OF PHYSICS CONDENSED MATTER 36 (26), p. 265601 - 12, doi: 10.1088/1361-648X/ad31bf (RAITH, EVAPORATOR, ICON-SPM, VERSALAB)

Rejhon, M.; Dědič, V.; Shestopalov, M.; Kunc, J.; Riedo, E., 2024: Impact of metastable graphene-diamond coatings on the fracture toughness of silicon carbide. NANOSCALE 16, p. 10590 - 10596, doi: 10.1039/D3NR06281C (RAITH)

KLÍMA, J.; WOJEWODA, O.; ROUČKA, V.; MOLNÁR, T.; HOLOBRÁDEK, J.; URBÁNEK, M., 2024: Zero-field spin wave turns. APPLIED PHYSICS LETTERS 124 (11), doi: 10.1063/5.0189394 (BRILLOUIN, EVAPORATOR, LYRA, KERR-MICROSCOPE, RAITH, ICON-SPM)

Singh, A.; Němec, H.; Kunc, J.; Kužel, P., 2024: Nanoscale terahertz conductivity and ultrafast dynamics of terahertz plasmons in periodic arrays of epitaxial graphene nanoribbons. PHYSICAL REVIEW RESEARCH 6 (3), doi: 10.1103/PhysRevResearch.6.033063 (RAITH, RIE-FLUORINE)

Kunc, J.; Fridrišek, T.; Shestopalov, M.; Jo, J.; Park, K., 2024: Graphene–insulator–metal diodes: Enhanced dielectric strength of the Al2O3 barrier. AIP ADVANCES 14 (9), p. 1 - 9, doi: 10.1063/5.0223763 (RAITH, RIE-FLUORINE, ALD, EVAPORATOR, WIRE-BONDER, KRATOS-XPS)

Krčma, J., 2024: Controlled Excitation of Magnons through Optically Induced Mie Resonances in Periodic Dielectric Nanostructures. BACHELOR'S THESIS (EVAPORATOR, RAITH, RIE-FLUORINE, KAUFMAN, BRILLOUIN, VERIOS)

WOJEWODA, O.; HOLOBRÁDEK, J.; PAVELKA, D.; PRIBYTOVA, E.; KRČMA, J.; KLÍMA, J.; PANDA, J.; MICHALIČKA, J.; LEDNICKÝ, T.; CHUMAK, A.; URBÁNEK, M., 2024: Unidirectional propagation of zero-momentum magnons. APPLIED PHYSICS LETTERS 125 (13), p. 1 - 6, doi: 10.1063/5.0218478 (TITAN, BRILLOUIN, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, RAITH, VERSALAB)

Kunc, J.; Morzhuk, B.; Shestopalov, M.; Fridrišek, T.; Dědič, V., 2023: Spectral current density and responsivity scaling for Fourier transform photocurrent spectroscopy. REVIEW OF SCIENTIFIC INSTRUMENTS 94 (5), doi: 10.1063/5.0139027 (RAITH, MIRA-EBL, EVAPORATOR, RIE-FLUORINE)

WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6 (1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD, LYRA, ICON-SPM, BRILLOUIN)

KNAUER, S.; DAVÍDKOVÁ, K.; SCHMOLL, D.; SERHA, R.; VORONOV, A.; WANG, Q.; VERBA, R.; DOBROVOLSKIY, O.; LINDNER, M.; REIMANN, T.; DUBS, C.; URBÁNEK, M.; CHUMAK, A., 2023: Propagating spin-wave spectroscopy in a liquid-phase epitaxial nanometer-thick YIG film at millikelvin temperatures. JOURNAL OF APPLIED PHYSICS 133 (14), p. 1 - 8, doi: 10.1063/5.0137437 (RAITH, RIE-FLUORINE, SCIA, BRILLOUIN, EVAPORATOR, VNA-MPI)

WOJEWODA, O.; HRTOŇ, M.; DHANKHAR, M.; KRČMA, J.; DAVÍDKOVÁ, K.; KLÍMA, J.; HOLOBRÁDEK, J.; LIGMAJER, F.; ŠIKOLA, T.; URBÁNEK, M., 2023: Phase-resolved optical characterization of nanoscale spin waves. APPLIED PHYSICS LETTERS 122 (20), p. 1 - 6, doi: 10.1063/5.0151338 (RAITH, BRILLOUIN, LYRA, MAGNETRON, EVAPORATOR)

Schánilec, V. , 2023: Artificial arrays of magnetic nanostructures. PH.D. THESIS, p. 1 - 128 (RAITH, EVAPORATOR)

Idesová, B., 2023: Design and fabrication of dielectric metasurfaces for ultraviolet wavelengths. MASTER'S THESIS, p. 1 - 71 (EVAPORATOR, ALD, RAITH, NANOCALC, SCIA)

MENDOSA-SANDOVAL, E.; RODRIGUEZ-LOPEZ, G.; ORDONEZ-ROMERO, C.; LAY, D.; QURESHI, N.; URBÁNEK, M.; SOLIS-IBARRA, D.; NOGUEZ, C.; LARA-GARCIA, H.; PIRRUCCIO, G., 2022: Shaping and enhancing the photoluminescence of halide perovskite quantum dots with plasmonic lattices. JOURNAL OF MATERIALS CHEMISTRY C, p. 3704 - 9, doi: 10.1039/d1tc05331k (RAITH, MAGNETRON, RIE-CHLORINE, LYRA)

Sreedhara, MB.; Bukvisova, K.; Khadiev, A.; Citterberg, D.; Cohen, H.; Balema, V.; Pathak, AK.; Novikov, D.; Leitus, G.; Kaplan-Ashiri, I.; Kolibal, M.; Enyashin, AN.; Houben, L.; Tenne, R., 2022: Nanotubes from the Misfit Layered Compound (SmS)(1.)19TaS2: Atomic Structure, Charge Transfer, and Electrical Properties. CHEMISTRY OF MATERIALS 34 (4), p. 1838 - 16, doi: 10.1021/acs.chemmater.1c04106 (TITAN, HELIOS, RAITH, EVAPORATOR, MPS150, KEITHLEY-4200, ALD)

FLAJŠMAN, L.; WOJEWODA, O.; QIN, H.; DAVÍDKOVÁ, K.; URBÁNEK, M.; VAN DIJKEN, S., 2022: Wideband Brillouin light scattering analysis of spin waves excited by a white-noise RF generator. APPLIED PHYSICS LETTERS 121 (23), doi: 10.1063/5.0124764 (BRILLOUIN, RAITH, EVAPORATOR)

Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS, p. 1 - 113 (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)

Zadorozhnii, O., 2021: Exchange bias in metamagnetic heterostructures. MASTER'S THESIS, p. 1 - 81 (MAGNETRON, VERSALAB, KERR-MICROSCOPE, RAITH, RIE-FLUORINE, LYRA)

TURČAN, I.; FLAJŠMAN, L.; WOJEWODA, O.; ROUČKA, V.; MAN, O.; URBÁNEK, M., 2021: Spin wave propagation in corrugated waveguides. APPLIED PHYSICS LETTERS 118 (9), p. 1 - 5, doi: 10.1063/5.0041138 (HELIOS, LYRA, ICON-SPM, RAITH, KERR-MICROSCOPE, VERSALAB, VNA-MPI, BRILLOUIN)

Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS, p. 1 - 100 (KERR-MICROSCOPE, ICON-SPM, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD, WIRE-BONDER, SUSS-RCD8)

VAŇATKA, M.; SZULC, K.; WOJEWODA, O.; DUBS, C.; CHUMAK, A.; KRAWCZYK, M.; DOBROVOLSKIY, O.; KLOS, J.; URBÁNEK, M., 2021: Spin-Wave Dispersion Measurement by Variable-Gap Propagating Spin-Wave Spectroscopy. PHYSICAL REVIEW APPLIED 16 (5), p. 054033-1 - 10, doi: 10.1103/PhysRevApplied.16.054033 (VNA-MPI, BRILLOUIN, RAITH, EVAPORATOR, MAGNETRON, DIENER, VERIOS, RIE-FLUORINE)

Hache, T.; Vanatka, M.; Flajsman, L.; Weinhold, T.; Hula, T.; Ciubotariu, O.; Albrecht, M.; Arkook, B.; Barsukov, I.; Fallarino, L.; Hellwig, O.; Fassbender, J.; Urbanek, M.; Schultheiss, H., 2020: Freestanding Positionable Microwave-Antenna Device for Magneto-Optical Spectroscopy Experiments. PHYSICAL REVIEW APPLIED 13 (5), p. 054009-1 - 10, doi: 10.1103/PhysRevApplied.13.054009 (RAITH, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, BRILLOUIN)

Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS, p. 1 - 199 (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)

SCHÁNILEC, V.; CANALS, B.; UHLÍŘ, V.; FLAJŠMAN, L.; SADÍLEK, J.; ŠIKOLA, T.; ROUGEMAILLE, N., 2020: Bypassing Dynamical Freezing in Artificial Kagome Ice. PHYSICAL REVIEW LETTERS 125, p. 057203-1 - 5, doi: 10.1103/PhysRevLett.125.057203 (RAITH, EVAPORATOR, VERIOS, ICON-SPM)

Mentes, TO.; Genuzio, F.; Schanilec, V.; Sadilek, J.; Rougemaille, N.; Locatelli, A., 2020: Coherent x-ray scattering in an XPEEM setup. ULTRAMICROSCOPY 216, p. 113035-1 - 8, doi: 10.1016/j.ultramic.2020.113035 (RAITH, EVAPORATOR)

Tesař, J., 2020: Fabrication and characterization of atomically thin layers. MASTER'S THESIS, p. 1 - 67 (MPS150, EVAPORATOR, RAITH, ICON-SPM, WIRE-BONDER)

Babocký, J., 2020: Fabrication and characterization of nanostructures with functional properties in the field of plasmonics. PH.D. THESIS, p. 1 - 104 (MIRA-EBL, RAITH, EVAPORATOR, ICON-SPM)

Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER'S THESIS, p. 1 - 55 (MAGNETRON, MIRA-EBL, RAITH, ICON-SPM, VERSALAB)

CHMELA, O.; SADÍLEK, J.; SAMA, DOMENECH-GIL, G.; J.; SOMER, J.; MOHAN, R.; ROMANO-RODRIGUEZ, A.; HUBÁLEK, J.; VALLEJOS VARGAS, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10 (19), p. 9087 - 10, doi: 10.1039/c8nr01588k (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)

Schánilec, V., 2018: Magnetic spin ice states in artificial magnetic frustrated systems. MASTER'S THESIS, p. 1 - 46 (RAITH, EVAPORATOR, VERIOS, ICON-SPM)

VAŇATKA, M.; URBÁNEK, M.; JÍRA, R.; FLAJŠMAN, L.; DHANKHAR, M.; IM, M.; MICHALIČKA, J.; UHLÍŘ, V.; ŠIKOLA, T., 2017: Magnetic vortex nucleation modes in static magnetic fields. AIP ADVANCES 7 (10), p. 1 - 8, doi: 10.1063/1.5006235 (DWL, EVAPORATOR, RAITH, TITAN, WIRE-BONDER)

Jaskowiec, J., 2017: Magnetic Force Microscopy and Transport Properties of Metamagnetic Nanostructures. BACHELOR'S THESIS, p. 1 - 47 (MAGNETRON, MIRA-EBL, RAITH, ICON-SPM, LYRA)

Chmela, O; Sadilek, J; Sama, J; Romano-Rodriguez, A; Hubalek, J; Vallejos, S, 2017: Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2. NANOTECHNOLOGY VIII 10248, doi: 10.1117/12.2265000 (RAITH, DWL, KAUFMAN, SCIA, RIE-FLUORINE, MAGNETRON, RIGAKU3)