Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS
SEM is a type of microscope where a focused beam of electrons is scanned over the sample to generate an image or to modify the sample surface in nanometric resolution (usually better than 10 nm). The sample image is generated by detecting secondary and backscattered electrons emitted from the impact location of the beam. The tool is preferred for e-beam lithography, where the resist-coated sample is selectively exposed to the electron beam, allowing the preparation of very small patterns (< 50 nm and less) in the resistant surface. There can be further processing of the sample by wet chemistry (development, stripping). An interferometric stage can also be used to achieve ultimate resolution of electron beam lithography over a large area and to join more fields together.
Publications
KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines. ACS APPLIED ELECTRONIC MATERIALS 6 (12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450 (ALD, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, WIRE-BONDER)
GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107 (12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144 (ALD, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, ICON-SPM, WOOLLAM-MIR)
GALLINA, P.; KONEČNÁ, A.; LIŠKA, J.; IDROBO, J.; ŠIKOLA, T., 2023: Strongly Coupled Plasmon and Phonon Polaritons as Seen by Photon and Electron Probes. PHYSICAL REVIEW APPLIED 19 (2), p. 24042 - 11, doi: 10.1103/PhysRevApplied.19.024042 (MIRA-EBL, EVAPORATOR, FTIR)
Kunc, J.; Morzhuk, B.; Shestopalov, M.; Fridrišek, T.; Dědič, V., 2023: Spectral current density and responsivity scaling for Fourier transform photocurrent spectroscopy. REVIEW OF SCIENTIFIC INSTRUMENTS 94 (5), doi: 10.1063/5.0139027 (RAITH, MIRA-EBL, EVAPORATOR, RIE-FLUORINE)
BRODSKÝ, J.; GABLECH, I.; MIGLIACCIO, L.; HAVLÍČEK, M.; DONAHUE, M.; GLOWACKI, E., 2023: Downsizing the Channel Length of Vertical Organic Electrochemical Transistors. ACS APPL MATER INTER 15 (22), p. 27002 - 8, doi: 10.1021/acsami.3c02049 (SUSS-MA8, EVAPORATOR, SCIA, PARYLENE-SCS, RIE-FLUORINE, MIRA-EBL, DEKTAK, ICON-SPM)
WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: Observing high-k magnons with Mie-resonance-enhanced Brillouin light scattering. COMMUNICATIONS PHYSICS 6 (1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD, LYRA, ICON-SPM, BRILLOUIN)
NOVCIC, K.; IFFELSBERGER, C.; PALACIOS CORELLA, M.; PUMERA, M., 2023: Solvents dramatically influence the atomic composition and catalytic properties of Ti3C2Tx MXenes. JOURNAL OF MATERIALS CHEMISTRY A 11 (25), p. 13419 - 13, doi: 10.1039/d3ta01441j (MIRA-EBL, KRATOS-XPS)
Klíma, J., 2023: Spin waves in non-trivial magnetic landscapes. BACHELOR'S THESIS, p. 1 - 69 (MIRA-EBL, LYRA, ICON-SPM, KERR-MICROSCOPE, BRILLOUIN, EVAPORATOR)
ŠVARC, V.; BARTOŠÍK, M.; KONEČNÝ, M.; PIASTEK, J.; NEZVAL, D.; MACH, J.; ŠIKOLA, T., 2023: Side charge propagation in simultaneous KPFM and transport measurement of humidity exposed graphene FET sensor. CARBON 215, p. 118471 - 12, doi: 10.1016/j.carbon.2023.118471 (RIE-FLUORINE, EVAPORATOR, MIRA-EBL, WIRE-BONDER)
ROVENSKÁ, K.; LIGMAJER, F.; IDESOVÁ, B.; KEPIČ, P.; LIŠKA, J.; CHOCHOL, J.; ŠIKOLA, T., 2023: Structural color filters with compensated angle-dependent shifts. OPTICS EXPRESS 31 (26), p. 43048 - 9, doi: 10.1364/OE.506069 (EVAPORATOR, MIRA-EBL, RIE-CHLORINE, ALD)
LAMB-CAMARENA, S.; PORRATI, F.; KUPRAVA, A.; WANG, Q.; URBÁNEK, M.; BARTH, S.; MAKAROV, D.; HUTH, M.; DOBROVOLSKIY, O., 2023: 3D Magnonic Conduits by Direct Write Nanofabrication. NANOMATERIALS 13 (13), doi: 10.3390/nano13131926 (MIRA-EBL, EVAPORATOR, BRILLOUIN)
MILOSAVLJEVIĆ, V.; KOŠARIŠŤANOVÁ, L.; DOLEŽELÍKOVÁ, K.; ADAM, V.; PUMERA, M., 2022: Microrobots with Antimicrobial Peptide Nanoarchitectonics for the Eradication of Antibiotic-Resistant Biofilms. ADVANCED MATERIALS FOR OPTICS AND ELECTRONICS 32 (43), p. 1 - 11, doi: 10.1002/adfm.202112935 (LEICACOAT-NANO, MIRA-EBL, MIRA-STAN, KRATOS-XPS)
Fridrišek, T., 2022: Optical gating of epitaxial graphene. MASTER'S THESIS (MIRA-EBL, RIE-FLUORINE, EVAPORATOR, LYRA, WIRE-BONDER)
Vodička, M., 2022: Fabrication and characterisation of plasmonic antennas on selected thin film with aim to get enhanced absorption due to presence of strong coupling. BACHELOR'S THESIS, p. 1 - 60 (MIRA-EBL, FTIR, EVAPORATOR, MPS150)
Děcký, M., 2022: Fabrication and testing of microbolometer or other infrared detector based on plasmonic antennas. BACHELOR'S THESIS, p. 1 - 44 (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)
Turčan, I., 2022: Magnetism in curved geometries. PH.D. THESIS, p. 1 - 117 (LYRA, BRILLOUIN, ICON-SPM, MIRA-EBL, KERR-MICROSCOPE, HELIOS)
Vaňatka, M., 2021: Static and dynamic properties of nanostructured magnetic materials. PH.D. THESIS, p. 1 - 113 (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
USSIA, M.; URSO, M.; DOLEŽELÍKOVÁ, K.; MICHÁLKOVÁ, H.; ADAM, V.; PUMERA, M., 2021: Active Light-powered antibiofilm ZnO micromotors with chemically programmable properties. ADVANCED FUNCTIONAL MATERIALS 31 (27), p. 1 - 10, doi: 10.1002/adfm.202101178 (MIRA-EBL, RIGAKU9, KRATOS-XPS)
Hajduček, J., 2021: Imaging of metamagnetic thin films using TEM. MASTER'S THESIS, p. 1 - 78 (MAGNETRON, VERSALAB, MIRA-EBL, HELIOS, TITAN)
KEPIČ, P.; LIGMAJER, F.; HRTOŇ, M.; REN, H.; MENEZES, L.; MAIER, S.; ŠIKOLA, T., 2021: Optically Tunable Mie Resonance VO2 Nanoantennas for Metasurfaces in the Visible. ACS PHOTONICS 8 (4), p. 1048 - 10, doi: 10.1021/acsphotonics.1c00222 (EVAPORATOR, MIRA-EBL, WOOLLAM-VIS)
Dhankhar, M.;, 2021: Magnetic vortex based memory device. PH.D. THESIS, p. 1 - 100 (KERR-MICROSCOPE, ICON-SPM, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD, WIRE-BONDER, SUSS-RCD8)
Kepič, P., 2021: Design and fabrication of tunable dielectric metasurfaces for visible and infrared wavelengths. MASTER'S THESIS, p. 1 - 76 (MIRA-EBL, EVAPORATOR, ICON-SPM, DEKTAK, LYRA, KRATOS-XPS)
Pejchal, T., 2021: Towards highly-doped Ge and ZnO nanowires: Growth, characterization and doping level analysis. PH.D. THESIS (NANOSAM, VERIOS, KRATOS-XPS, HELIOS, TITAN, ALD, EVAPORATOR, MIRA-EBL, MPS150)
Idesová, B., 2021: Plasmonically active nanostructures for optical filtering. BACHELOR'S THESIS, p. 1 - 47 (EVAPORATOR, MIRA-EBL, FTIR)
KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T., 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9 (3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326 (HELIOS, MIRA-EBL, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
Horák, M., 2020: Electron microscopy and spectroscopy in plasmonics. PH.D. THESIS, p. 1 - 129 (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)
LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326 (EVAPORATOR, LYRA, RIE-FLUORINE, MIRA-EBL, ICON-SPM)
Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M , 2020: Propagation of spin waves through a Neel domain wall. APPLIED PHYSICS LETTERS 117 (2), p. 022405-1 - 5, doi: 10.1063/5.0013692 (EVAPORATOR, KERR-MICROSCOPE, ICON-SPM, LYRA, BRILLOUIN, MIRA-EBL)
Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER'S THESIS, p. 1 - 57 (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)
Babocký, J., 2020: Fabrication and characterization of nanostructures with functional properties in the field of plasmonics. PH.D. THESIS, p. 1 - 104 (MIRA-EBL, RAITH, EVAPORATOR, ICON-SPM)
Wojewoda, O., 2020: Phase-resolved Brillouin light scattering: development and applications. MASTER'S THESIS (ICON-SPM, BRILLOUIN, EVAPORATOR, LYRA, MIRA-EBL, KERR-MICROSCOPE)
BOUCHAL, P.; DVOŘÁK, P.; BABOCKÝ, J.; BOUCHAL, Z.; LIGMAJER, F.; HRTOŇ, M.; KŘÁPEK, V.; FAßBENDER, A.; LINDEN, S.; CHMELÍK, R.; ŠIKOLA, T., 2019: High-Resolution Quantitative Phase Imaging of Plasmonic Metasurfaces with Sensitivity down to a Single Nanoantenna. NANO LETTERS 19 (2), p. 1242 - 9, doi: 10.1021/acs.nanolett.8b04776 (EVAPORATOR, MIRA-EBL, VERIOS)
Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR'S THESIS, p. 1 - 46 (MAGNETRON, ICON-SPM, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB)
Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER'S THESIS, p. 1 - 64 (LYRA, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER)
Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER'S THESIS, p. 1 - 50 (MIRA-EBL, EVAPORATOR, WIRE-BONDER, TITAN, MPS150)
Jaskowiec, J., 2019: Spatial confinement effects in metamagnetic nanostructures. MASTER'S THESIS, p. 1 - 55 (MAGNETRON, MIRA-EBL, RAITH, ICON-SPM, VERSALAB)
HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8 (1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1 (TITAN, HELIOS, MIRA-EBL, EVAPORATOR, ICON-SPM)
Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS, p. 1 - 139 (ALD, DIENER, EVAPORATOR, MIRA-EBL, PECVD, WIRE-BONDER)
DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817 (MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)
Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER'S THESIS, p. 1 - 83 (LYRA, HELIOS, KERR-MICROSCOPE, ICON-SPM, MIRA-EBL, EVAPORATOR, WIRE-BONDER)
Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS, p. 1 - 45 (MIRA-EBL, EVAPORATOR, FTIR)
ARREGI URIBEETXEBARRIA, J.; HORKÝ, M.; FABIANOVÁ, K.; TOLLEY, R.; FULLERTON, E.; UHLÍŘ, V., 2018: Magnetization reversal and confinement effects across the metamagnetic phase transition in mesoscale FeRh structures. JOURNAL OF PHYSICS D - APPLIED PHYSICS 51 (10), p. 1 - 12, doi: 10.1088/1361-6463/aaaa5a (MIRA-EBL, LYRA, MAGNETRON)
PROCHÁZKA, P.; MAREČEK, D.; LIŠKOVÁ, Z.; ČECHAL, J.; ŠIKOLA, T., 2017: X-ray induced electrostatic graphene doping via defect charging in gate dielectric. SCIENTIFIC REPORTS 7, p. 1 - 7, doi: 10.1038/s41598-017-00673-z (MIRA-EBL, DIENER, ALD, WIRE-BONDER)
BABOCKÝ, J.; KŘÍŽOVÁ, A.; ŠTRBKOVÁ, L.; KEJÍK, L.; LIGMAJER, F.; HRTOŇ, M.; DVOŘÁK, P.; TÝČ, M.; ČOLLÁKOVÁ, J.; KŘÁPEK, V.; KALOUSEK, R.; CHMELÍK, R.; ŠIKOLA, T., 2017: Quantitative 3D phase imaging of plasmonic metasurfaces. ACS PHOTONICS 4 (6), p. 1389 - 9, doi: 10.1021/acsphotonics.7b00022 (MIRA-EBL, LYRA, EVAPORATOR)
Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER'S THESIS, p. 1 - 55 (MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER)
Holobrádek, J., 2017: Transport Properties of One Magnetic Nanostructures. BACHELOR'S THESIS, p. 1 - 48 (TITAN, ICON-SPM, MIRA-EBL, EVAPORATOR, WIRE-BONDER)
Citterberg, D., 2017: Preparation of contacts to one-dimensional nanostructurs. BACHELOR'S THESIS, p. 1 - 26 (DWL, MIRA-EBL, WIRE-BONDER, EVAPORATOR)
Jaskowiec, J., 2017: Magnetic Force Microscopy and Transport Properties of Metamagnetic Nanostructures. BACHELOR'S THESIS, p. 1 - 47 (MAGNETRON, MIRA-EBL, RAITH, ICON-SPM, LYRA)
Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM, p. 1 - 31 (TITAN, MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
Musálek, T., 2016: Semiconductor nanowire growth utilizing alloyed catalyst. MASTER’S THESIS, p. 1 - 52 (VERIOS, LYRA, MIRA-EBL, ALD)
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS, p. 1 - 54 (PECVD, MIRA-EBL, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)
BABOCKÝ, J.; DVOŘÁK, P.; LIGMAJER, F.; HRTOŇ, M.; ŠIKOLA, T.; BOK, J.; FIALA, J., 2016: Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 34 (6), p. 06K801-1 - 4, doi: 10.1116/1.4966959 (MIRA-EBL)
Gallery
